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An Open-Loop Positioning Method for Reduction of Influence of Nonlinearities in Piezoelectric Actuator
http://hdl.handle.net/10091/15987
http://hdl.handle.net/10091/15987aa289ad0-1f7c-40fc-aaf1-b1f49f38693a
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2012-09-21 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | An Open-Loop Positioning Method for Reduction of Influence of Nonlinearities in Piezoelectric Actuator | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Piezoelectric Actuator | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Open-Loop Drive | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Precise Positioning | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Voltage Drive | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Creep | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Hysteresis | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
著者 |
Henmi, Nobuhiko
× Henmi, Nobuhiko |
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信州大学研究者総覧へのリンク | ||||||
氏名 | Henmi, Nobuhiko | |||||
URL | http://soar-rd.shinshu-u.ac.jp/profile/ja.ZNyNbpkh.html | |||||
出版者 | ||||||
出版者 | JAPAN SOC MECHANICAL ENGINEERS | |||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | JOURNAL OF ADVANCED MECHANICAL DESIGN SYSTEMS AND MANUFACTURING. 5(1):70-79 (2011) | |||||
書誌情報 |
JOURNAL OF ADVANCED MECHANICAL DESIGN SYSTEMS AND MANUFACTURING 巻 5, 号 1, p. 70-79, 発行日 2011-04-21 |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | A unique driving method of piezoelectric actuator to reduce influences of hysteresis and creep is represented in the paper. It is for point-to-point (PTP) open-loop positioning. In the method, when an object is stepwise positioned using the piezoelectric actuator, the input voltage to the actuator is raised up to maximum value and pulled down to 0V sinusoidally in order to initialize the actuator condition, and then it is returned to a constant starting point at the beginning of every step. Finally it is raised up to appropriate step height with some overshoot. Both influences of hysteresis and creep characteristics are reduced drastically using the method. Stepwise positioning of 2 mu m step height with 0.2 mu m accuracy is realized using the basic method. For nano-meter order positioning accuracy, creep behavior of the actuator is serious problem. It is found that multi-cycle large sinusoidal drive which is called initializing drive can reduce creep motion significantly. Eventually, less than 5nm accuracy for 20nm stepwise PTP positioning is realized. | |||||
資源タイプ(コンテンツの種類) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Article | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 1881-3054 | |||||
他の資源との関係:URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | https://www.jstage.jst.go.jp/article/jamdsm/5/1/5_1_70/_article | |||||
関連名称 | https://www.jstage.jst.go.jp/article/jamdsm/5/1/5_1_70/_article | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1299/jamdsm.5.70 | |||||
関連名称 | 10.1299/jamdsm.5.70 | |||||
権利 | ||||||
権利情報 | Copyright© 2011 by The Japan Society of Mechanical Engineers | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
WoS | ||||||
表示名 | Web of Science | |||||
URL | http://gateway.isiknowledge.com/gateway/Gateway.cgi?&GWVersion=2&SrcAuth=ShinshuUniv&SrcApp=ShinshuUniv&DestLinkType=FullRecord&DestApp=WOS&KeyUT=000290895900004 |