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  1. 060 工学部
  2. 0601 学術論文

An Open-Loop Positioning Method for Reduction of Influence of Nonlinearities in Piezoelectric Actuator

http://hdl.handle.net/10091/15987
aa289ad0-1f7c-40fc-aaf1-b1f49f38693a
名前 / ファイル ライセンス アクション
Open-Loop_Positioning_Method_Reduction_Influence.pdf Open-Loop_Positioning_Method_Reduction_Influence.pdf (627.5 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2012-09-21
タイトル
言語 en
タイトル An Open-Loop Positioning Method for Reduction of Influence of Nonlinearities in Piezoelectric Actuator
言語
言語 eng
キーワード
主題Scheme Other
主題 Piezoelectric Actuator
キーワード
主題Scheme Other
主題 Open-Loop Drive
キーワード
主題Scheme Other
主題 Precise Positioning
キーワード
主題Scheme Other
主題 Voltage Drive
キーワード
主題Scheme Other
主題 Creep
キーワード
主題Scheme Other
主題 Hysteresis
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
著者 Henmi, Nobuhiko

× Henmi, Nobuhiko

WEKO 37759

Henmi, Nobuhiko

Search repository
信州大学研究者総覧へのリンク
氏名 Henmi, Nobuhiko
URL http://soar-rd.shinshu-u.ac.jp/profile/ja.ZNyNbpkh.html
出版者
出版者 JAPAN SOC MECHANICAL ENGINEERS
引用
内容記述タイプ Other
内容記述 JOURNAL OF ADVANCED MECHANICAL DESIGN SYSTEMS AND MANUFACTURING. 5(1):70-79 (2011)
書誌情報 JOURNAL OF ADVANCED MECHANICAL DESIGN SYSTEMS AND MANUFACTURING

巻 5, 号 1, p. 70-79, 発行日 2011-04-21
抄録
内容記述タイプ Abstract
内容記述 A unique driving method of piezoelectric actuator to reduce influences of hysteresis and creep is represented in the paper. It is for point-to-point (PTP) open-loop positioning. In the method, when an object is stepwise positioned using the piezoelectric actuator, the input voltage to the actuator is raised up to maximum value and pulled down to 0V sinusoidally in order to initialize the actuator condition, and then it is returned to a constant starting point at the beginning of every step. Finally it is raised up to appropriate step height with some overshoot. Both influences of hysteresis and creep characteristics are reduced drastically using the method. Stepwise positioning of 2 mu m step height with 0.2 mu m accuracy is realized using the basic method. For nano-meter order positioning accuracy, creep behavior of the actuator is serious problem. It is found that multi-cycle large sinusoidal drive which is called initializing drive can reduce creep motion significantly. Eventually, less than 5nm accuracy for 20nm stepwise PTP positioning is realized.
資源タイプ(コンテンツの種類)
内容記述タイプ Other
内容記述 Article
ISSN
収録物識別子タイプ ISSN
収録物識別子 1881-3054
他の資源との関係:URI
関連識別子
識別子タイプ URI
関連識別子 https://www.jstage.jst.go.jp/article/jamdsm/5/1/5_1_70/_article
関連名称
関連名称 https://www.jstage.jst.go.jp/article/jamdsm/5/1/5_1_70/_article
DOI
関連識別子
識別子タイプ DOI
関連識別子 https://doi.org/10.1299/jamdsm.5.70
関連名称
関連名称 10.1299/jamdsm.5.70
権利
権利情報 Copyright© 2011 by The Japan Society of Mechanical Engineers
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
WoS
表示名 Web of Science
URL http://gateway.isiknowledge.com/gateway/Gateway.cgi?&GWVersion=2&SrcAuth=ShinshuUniv&SrcApp=ShinshuUniv&DestLinkType=FullRecord&DestApp=WOS&KeyUT=000290895900004
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