{"created":"2021-03-01T06:15:18.598514+00:00","id":12399,"links":{},"metadata":{"_buckets":{"deposit":"a416fbfc-393e-41ef-995d-93e93072d948"},"_deposit":{"id":"12399","owners":[],"pid":{"revision_id":0,"type":"depid","value":"12399"},"status":"published"},"_oai":{"id":"oai:soar-ir.repo.nii.ac.jp:00012399","sets":["1221:1222"]},"author_link":["37759"],"item_1628147817048":{"attribute_name":"出版タイプ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_6_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2011-04-21","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"1","bibliographicPageEnd":"79","bibliographicPageStart":"70","bibliographicVolumeNumber":"5","bibliographic_titles":[{"bibliographic_title":"JOURNAL OF ADVANCED MECHANICAL DESIGN SYSTEMS AND MANUFACTURING"}]}]},"item_6_description_20":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"A unique driving method of piezoelectric actuator to reduce influences of hysteresis and creep is represented in the paper. It is for point-to-point (PTP) open-loop positioning. In the method, when an object is stepwise positioned using the piezoelectric actuator, the input voltage to the actuator is raised up to maximum value and pulled down to 0V sinusoidally in order to initialize the actuator condition, and then it is returned to a constant starting point at the beginning of every step. Finally it is raised up to appropriate step height with some overshoot. Both influences of hysteresis and creep characteristics are reduced drastically using the method. Stepwise positioning of 2 mu m step height with 0.2 mu m accuracy is realized using the basic method. For nano-meter order positioning accuracy, creep behavior of the actuator is serious problem. It is found that multi-cycle large sinusoidal drive which is called initializing drive can reduce creep motion significantly. Eventually, less than 5nm accuracy for 20nm stepwise PTP positioning is realized.","subitem_description_type":"Abstract"}]},"item_6_description_30":{"attribute_name":"資源タイプ（コンテンツの種類）","attribute_value_mlt":[{"subitem_description":"Article","subitem_description_type":"Other"}]},"item_6_description_5":{"attribute_name":"引用","attribute_value_mlt":[{"subitem_description":"JOURNAL OF ADVANCED MECHANICAL DESIGN SYSTEMS AND MANUFACTURING. 5(1):70-79 (2011)","subitem_description_type":"Other"}]},"item_6_link_3":{"attribute_name":"信州大学研究者総覧へのリンク","attribute_value_mlt":[{"subitem_link_text":"Henmi, Nobuhiko","subitem_link_url":"http://soar-rd.shinshu-u.ac.jp/profile/ja.ZNyNbpkh.html"}]},"item_6_link_67":{"attribute_name":"WoS","attribute_value_mlt":[{"subitem_link_url":"http://gateway.isiknowledge.com/gateway/Gateway.cgi?&GWVersion=2&SrcAuth=ShinshuUniv&SrcApp=ShinshuUniv&DestLinkType=FullRecord&DestApp=WOS&KeyUT=000290895900004"}]},"item_6_publisher_4":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"JAPAN SOC MECHANICAL ENGINEERS"}]},"item_6_relation_46":{"attribute_name":"他の資源との関係：URI","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"https://www.jstage.jst.go.jp/article/jamdsm/5/1/5_1_70/_article"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://www.jstage.jst.go.jp/article/jamdsm/5/1/5_1_70/_article","subitem_relation_type_select":"URI"}}]},"item_6_relation_48":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"10.1299/jamdsm.5.70"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://doi.org/10.1299/jamdsm.5.70","subitem_relation_type_select":"DOI"}}]},"item_6_rights_62":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright© 2011 by The Japan Society of Mechanical Engineers"}]},"item_6_source_id_35":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"1881-3054","subitem_source_identifier_type":"ISSN"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Henmi,  Nobuhiko"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2015-09-28"}],"displaytype":"detail","filename":"Open-Loop_Positioning_Method_Reduction_Influence.pdf","filesize":[{"value":"627.5 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"Open-Loop_Positioning_Method_Reduction_Influence.pdf","url":"https://soar-ir.repo.nii.ac.jp/record/12399/files/Open-Loop_Positioning_Method_Reduction_Influence.pdf"},"version_id":"52eb3bd8-02e4-458a-8f75-1dd7a6c06336"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Piezoelectric Actuator","subitem_subject_scheme":"Other"},{"subitem_subject":"Open-Loop Drive","subitem_subject_scheme":"Other"},{"subitem_subject":"Precise Positioning","subitem_subject_scheme":"Other"},{"subitem_subject":"Voltage Drive","subitem_subject_scheme":"Other"},{"subitem_subject":"Creep","subitem_subject_scheme":"Other"},{"subitem_subject":"Hysteresis","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"An Open-Loop Positioning Method for Reduction of Influence of Nonlinearities in Piezoelectric Actuator","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"An Open-Loop Positioning Method for Reduction of Influence of Nonlinearities in Piezoelectric Actuator","subitem_title_language":"en"}]},"item_type_id":"6","owner":"1","path":["1222"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2012-09-21"},"publish_date":"2012-09-21","publish_status":"0","recid":"12399","relation_version_is_last":true,"title":["An Open-Loop Positioning Method for Reduction of Influence of Nonlinearities in Piezoelectric Actuator"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2022-12-14T04:01:38.270396+00:00"}