@article{oai:soar-ir.repo.nii.ac.jp:00012462,
 author = {Maruyama,  Takayuki and Obinata,  Yosuke and Sonehara,  Makoto and Ikeda,  Kenji and Sato,  Toshiro},
 issue = {10},
 journal = {IEEE TRANSACTIONS ON MAGNETICS},
 month = {Oct},
 note = {In order to increase Q-factor of radio-frequency (RF) magnetic thin film inductor integrated in chip-size-package RF-ICs, two schemes have been investigated experimentally. For suppressing the in-plane eddy current of the magnetic thin film, a slit-patterned structure was introduced, and it was found that the slit-patterned magnetic thin film is very effective for increasing Q-factor. On the other hand, for suppressing alternating current (ac) copper loss, a multiline-conductor spiral coil was introduced, and it was found that the multiline coil is effective for improving decrease of inductance at high frequencies. By introducing the two schemes, a maximum Q-factor of 18 at 1.5 GHz was obtained in a spiral inductor with a bottom slit-patterned CoFeSiO/SiO granular multilayer film and triple-line-conductor spiral coil., Article, IEEE TRANSACTIONS ON MAGNETICS. 47(10):3196-3199 (2011)},
 pages = {3196--3199},
 title = {Increase of Q-Factor of RF Magnetic Thin Film Inductor by Introducing Slit-Patterned Magnetic Thin Film and Multiline-Conductor Spiral Coil},
 volume = {47},
 year = {2011}
}