{"created":"2021-03-01T06:15:30.396146+00:00","id":12594,"links":{},"metadata":{"_buckets":{"deposit":"73bbc30f-8e01-480a-8640-3f64ffa2a039"},"_deposit":{"id":"12594","owners":[],"pid":{"revision_id":0,"type":"depid","value":"12594"},"status":"published"},"_oai":{"id":"oai:soar-ir.repo.nii.ac.jp:00012594","sets":["1221:1222"]},"author_link":["38521","38522","38523","38524"],"item_1628147817048":{"attribute_name":"出版タイプ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_6_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2003-11-01","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"11","bibliographicPageEnd":"1190","bibliographicPageStart":"1184","bibliographicVolumeNumber":"86","bibliographic_titles":[{"bibliographic_title":"電子情報通信学会論文誌. C, エレクトロニクス"}]}]},"item_6_description_30":{"attribute_name":"資源タイプ（コンテンツの種類）","attribute_value_mlt":[{"subitem_description":"Article","subitem_description_type":"Other"}]},"item_6_description_5":{"attribute_name":"引用","attribute_value_mlt":[{"subitem_description":"電子情報通信学会論文誌. C, エレクトロニクス. 86(11): 1184-1190 (2003)","subitem_description_type":"Other"}]},"item_6_link_3":{"attribute_name":"信州大学研究者総覧へのリンク","attribute_value_mlt":[{"subitem_link_text":"上村, 喜一","subitem_link_url":"http://soar-rd.shinshu-u.ac.jp/profile/ja.yVkaZVkh.html"}]},"item_6_publisher_4":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"社団法人電子情報通信学会"}]},"item_6_relation_46":{"attribute_name":"他の資源との関係：URI","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"http://search.ieice.org/"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"http://search.ieice.org/","subitem_relation_type_select":"URI"}}]},"item_6_rights_62":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright (c) 2003 社団法人電子情報通信学会"}]},"item_6_source_id_35":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"1345-2827","subitem_source_identifier_type":"ISSN"}]},"item_6_source_id_40":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA11412446","subitem_source_identifier_type":"NCID"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"小畑,  元樹"}],"nameIdentifiers":[{"nameIdentifier":"38521","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"作田,  輝行"}],"nameIdentifiers":[{"nameIdentifier":"38522","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"林部,  林平"}],"nameIdentifiers":[{"nameIdentifier":"38523","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"上村,  喜一"}],"nameIdentifiers":[{"nameIdentifier":"38524","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2015-09-28"}],"displaytype":"detail","filename":"110003172071.pdf","filesize":[{"value":"889.3 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"110003172071.pdf","url":"https://soar-ir.repo.nii.ac.jp/record/12594/files/110003172071.pdf"},"version_id":"3e396f44-7906-4300-9063-f753f0f109d0"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"リアクティブスパッタ法によるTaN_x薄膜抵抗体の作製と電極との接触抵抗の評価(電子材料)","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"リアクティブスパッタ法によるTaN_x薄膜抵抗体の作製と電極との接触抵抗の評価(電子材料)","subitem_title_language":"ja"}]},"item_type_id":"6","owner":"1","path":["1222"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2009-03-06"},"publish_date":"2009-03-06","publish_status":"0","recid":"12594","relation_version_is_last":true,"title":["リアクティブスパッタ法によるTaN_x薄膜抵抗体の作製と電極との接触抵抗の評価(電子材料)"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2022-12-14T04:07:38.595348+00:00"}