@article{oai:soar-ir.repo.nii.ac.jp:00012650,
 author = {Ishida,  Y and Chen,  C and Hagihara,  M and Yamakami,  T and Hayashibe,  R and Abe,  K and Kamimura,  K},
 issue = {1},
 journal = {JAPANESE JOURNAL OF APPLIED PHYSICS},
 month = {Jan},
 note = {Article, JAPANESE JOURNAL OF APPLIED PHYSICS. 47(1):676-678(2008)},
 pages = {676--678},
 title = {Characterization of metal-insulator-semicomductor capacitors with insulating nitride films grown on 4H-SiC},
 volume = {47},
 year = {2008}
}