@article{oai:soar-ir.repo.nii.ac.jp:00012651,
 author = {Nakakuki,  M and Shiono,  A and Kobayashi,  I and Tajima,  N and Yamakami,  T and Hayashibe,  R and Abe,  K and Kamimura,  K and Obata,  M and Miyamoto,  M},
 issue = {1},
 journal = {JAPANESE JOURNAL OF APPLIED PHYSICS},
 month = {Jan},
 note = {Article, JAPANESE JOURNAL OF APPLIED PHYSICS. 47(1):609-611(2008)},
 pages = {609--611},
 title = {Characterization of Al-based insulating films fabricated by physical vapor deposition},
 volume = {47},
 year = {2008}
}