Growth and characterization of SiC films by hot-wire chemical vapor deposition at low substrate temperature using SiF4/CH4/H-2 mixture

WEKO3

AND

lat lon distance

[[sub_check.contents]]　

[[sub_radio.contents]]

Field does not validate

[[sub_attr.contents]]　

JJAP1　

ファイル	ライセンス
JJAP1　.pdf (243.8 kB) sha256 77a905be44fd68a257ea816d44422dcb719afa9dfe51f70e2842a85e64f3b899

公開日						2008-09-17

Version	Date Modified	Object File Name	File Size	File Hash Value	Contributor Name	Show/Hide

Downloads

Plays