@article{oai:soar-ir.repo.nii.ac.jp:00012673,
 author = {Abe,  K and Nagasaka,  Y and Kida,  T and Yamakami,  T and Hayashibe,  R and Kamimura,  K},
 issue = {5},
 journal = {Thin solid films},
 month = {Jan},
 note = {Article, THIN SOLID FILMS. 516(5): 637-640 (2008)},
 pages = {637--640},
 title = {Characterization of polycrystalline SiC films grown by HW-CVD using silicon tetrafluoride},
 volume = {516},
 year = {2008}
}