{"created":"2021-03-01T06:15:43.485437+00:00","id":12808,"links":{},"metadata":{"_buckets":{"deposit":"6c83b6b2-d313-4fde-9f42-d14e885b8916"},"_deposit":{"id":"12808","owners":[],"pid":{"revision_id":0,"type":"depid","value":"12808"},"status":"published"},"_oai":{"id":"oai:soar-ir.repo.nii.ac.jp:00012808"},"item_10_alternative_title_1":{"attribute_name":"\u305d\u306e\u4ed6\uff08\u5225\u8a00\u8a9e\u7b49\uff09\u306e\u30bf\u30a4\u30c8\u30eb","attribute_value_mlt":[{"subitem_alternative_title":"Operation of a DC-Magnetron Sputtering System with a Third Magnetic Pole and Its Application to Control of Chemical Composition of Thin Films"}]},"item_10_biblio_info_6":{"attribute_name":"\u66f8\u8a8c\u60c5\u5831","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1989-02-28","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"51","bibliographicPageStart":"45","bibliographicVolumeNumber":"65","bibliographic_titles":[{"bibliographic_title":"\u4fe1\u5dde\u5927\u5b66\u5de5\u5b66\u90e8\u7d00\u8981"}]}]},"item_10_description_30":{"attribute_name":"\u8cc7\u6e90\u30bf\u30a4\u30d7\uff08\u30b3\u30f3\u30c6\u30f3\u30c4\u306e\u7a2e\u985e\uff09","attribute_value_mlt":[{"subitem_description":"Article","subitem_description_type":"Other"}]},"item_10_description_5":{"attribute_name":"\u5f15\u7528","attribute_value_mlt":[{"subitem_description":"\u4fe1\u5dde\u5927\u5b66\u5de5\u5b66\u90e8\u7d00\u8981 65: 45-51 (1989)","subitem_description_type":"Other"}]},"item_10_publisher_4":{"attribute_name":"\u51fa\u7248\u8005","attribute_value_mlt":[{"subitem_publisher":"\u4fe1\u5dde\u5927\u5b66\u5de5\u5b66\u90e8"}]},"item_10_source_id_35":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0037-3818","subitem_source_identifier_type":"ISSN"}]},"item_10_source_id_40":{"attribute_name":"\u66f8\u8a8c\u30ec\u30b3\u30fc\u30c9ID","attribute_value_mlt":[{"subitem_source_identifier":"AN00121228","subitem_source_identifier_type":"NCID"}]},"item_creator":{"attribute_name":"\u8457\u8005","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"\u6df1\u6d77,  \u9f8d\u592b"}],"nameIdentifiers":[{"nameIdentifier":"39402","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"\u5cef\u4e38,  \u8cb4\u884c"}],"nameIdentifiers":[{"nameIdentifier":"39403","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"\u30d5\u30a1\u30a4\u30eb\u60c5\u5831","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2015-09-28"}],"displaytype":"detail","filename":"Engineering65-05.pdf","filesize":[{"value":"418.4 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"Engineering65-05.pdf","url":"https://soar-ir.repo.nii.ac.jp/record/12808/files/Engineering65-05.pdf"},"version_id":"25af380e-da85-4c7e-990b-6e7af700fd39"}]},"item_language":{"attribute_name":"\u8a00\u8a9e","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"\u8cc7\u6e90\u30bf\u30a4\u30d7","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"\u7b2c3\u78c1\u6975\u3092\u6709\u3059\u308b\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u88c5\u7f6e\u306e\u52d5\u4f5c\u3068\u8584\u819c\u7d44\u6210\u5236\u5fa1\u3078\u306e\u5fdc\u7528","item_titles":{"attribute_name":"\u30bf\u30a4\u30c8\u30eb","attribute_value_mlt":[{"subitem_title":"\u7b2c3\u78c1\u6975\u3092\u6709\u3059\u308b\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u88c5\u7f6e\u306e\u52d5\u4f5c\u3068\u8584\u819c\u7d44\u6210\u5236\u5fa1\u3078\u306e\u5fdc\u7528"}]},"item_type_id":"10","owner":"1","path":["1221/1223/1224/1242"],"pubdate":{"attribute_name":"\u516c\u958b\u65e5","attribute_value":"2009-03-03"},"publish_date":"2009-03-03","publish_status":"0","recid":"12808","relation_version_is_last":true,"title":["\u7b2c3\u78c1\u6975\u3092\u6709\u3059\u308b\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u88c5\u7f6e\u306e\u52d5\u4f5c\u3068\u8584\u819c\u7d44\u6210\u5236\u5fa1\u3078\u306e\u5fdc\u7528"],"weko_creator_id":"1","weko_shared_id":null},"updated":"2021-03-01T11:18:08.659290+00:00"}