@article{oai:soar-ir.repo.nii.ac.jp:00012932, author = {大路, 通雄 and 笹沢, 厚 and 宮島, 君夫}, journal = {信州大学工学部紀要}, month = {Jul}, note = {Article, 信州大学工学部紀要 38: 15-32 (1975)}, pages = {15--32}, title = {高周波誘導プラズマの非平衡理論}, volume = {38}, year = {1975} }