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For suppressing the in-plane eddy current of the magnetic thin film, a slit-patterned structure was introduced, and it was found that the slit-patterned magnetic thin film is very effective for increasing Q-factor. On the other hand, for suppressing alternating current (ac) copper loss, a multiline-conductor spiral coil was introduced, and it was found that the multiline coil is effective for improving decrease of inductance at high frequencies. By introducing the two schemes, a maximum Q-factor of 18 at 1.5 GHz was obtained in a spiral inductor with a bottom slit-patterned CoFeSiO/SiO granular multilayer film and triple-line-conductor spiral coil."}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Maruyama,  Takayuki"}], "nameIdentifiers": [{"nameIdentifier": "37968", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Obinata,  Yosuke"}], "nameIdentifiers": [{"nameIdentifier": "37969", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Sonehara,  Makoto"}], "nameIdentifiers": [{"nameIdentifier": "37970", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Ikeda,  Kenji"}], "nameIdentifiers": [{"nameIdentifier": "37971", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Sato,  Toshiro"}], "nameIdentifiers": [{"nameIdentifier": "37972", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2015-09-28"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "CV-01_VerF.pdf", "filesize": [{"value": "1.6 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_note", "mimetype": "application/pdf", "size": 1600000.0, "url": {"label": "CV-01_VerF.pdf", "url": "https://soar-ir.repo.nii.ac.jp/record/12462/files/CV-01_VerF.pdf"}, "version_id": "388c6749-4000-41ed-aa54-2b4a4ba718e5"}]}, "item_keyword": {"attribute_name": "\u30ad\u30fc\u30ef\u30fc\u30c9", "attribute_value_mlt": [{"subitem_subject": "Alternating current (ac) copper loss", "subitem_subject_scheme": "Other"}, {"subitem_subject": "cell-phone", "subitem_subject_scheme": "Other"}, {"subitem_subject": "eddy current", "subitem_subject_scheme": "Other"}, {"subitem_subject": "inductor", "subitem_subject_scheme": "Other"}, {"subitem_subject": "on-chip radio-frequency (RF) magnetic thin film devices", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Q-factor", "subitem_subject_scheme": "Other"}, {"subitem_subject": "RF front/end", "subitem_subject_scheme": "Other"}, {"subitem_subject": "wireless local area network (LAN)", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Increase of Q-Factor of RF Magnetic Thin Film Inductor by Introducing Slit-Patterned Magnetic Thin Film and Multiline-Conductor Spiral Coil", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "Increase of Q-Factor of RF Magnetic Thin Film Inductor by Introducing Slit-Patterned Magnetic Thin Film and Multiline-Conductor Spiral Coil", "subitem_title_language": "en"}]}, "item_type_id": "6", "owner": "1", "path": ["1221/1222"], "permalink_uri": "http://hdl.handle.net/10091/13525", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2012-02-13"}, "publish_date": "2012-02-13", "publish_status": "0", "recid": "12462", "relation": {}, "relation_version_is_last": true, "title": ["Increase of Q-Factor of RF Magnetic Thin Film Inductor by Introducing Slit-Patterned Magnetic Thin Film and Multiline-Conductor Spiral Coil"], "weko_shared_id": -1}