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  1. 060 工学部
  2. 0601 学術論文

Characterization of Al-based insulating films fabricated by physical vapor deposition

http://hdl.handle.net/10091/1158
384e53ee-7d63-4b63-8cd0-fa8e22678850
名前 / ファイル ライセンス アクション
JJAP2.pdf JJAP2.pdf (1.4 MB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2008-09-17
タイトル
言語 en
タイトル Characterization of Al-based insulating films fabricated by physical vapor deposition
言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
著者 Nakakuki, M

× Nakakuki, M

WEKO 38753

Nakakuki, M

Search repository
Shiono, A

× Shiono, A

WEKO 38754

Shiono, A

Search repository
Kobayashi, I

× Kobayashi, I

WEKO 38755

Kobayashi, I

Search repository
Tajima, N

× Tajima, N

WEKO 38756

Tajima, N

Search repository
Yamakami, T

× Yamakami, T

WEKO 38757

Yamakami, T

Search repository
Hayashibe, R

× Hayashibe, R

WEKO 38758

Hayashibe, R

Search repository
Abe, K

× Abe, K

WEKO 38759

Abe, K

Search repository
Kamimura, K

× Kamimura, K

WEKO 38760

Kamimura, K

Search repository
Obata, M

× Obata, M

WEKO 38761

Obata, M

Search repository
Miyamoto, M

× Miyamoto, M

WEKO 38762

Miyamoto, M

Search repository
信州大学研究者総覧へのリンク
氏名 Kamimura, K
URL http://soar-rd.shinshu-u.ac.jp/profile/ja.yVkaZVkh.html
出版者
出版者 INST PURE APPLIED PHYSICS
引用
内容記述タイプ Other
内容記述 JAPANESE JOURNAL OF APPLIED PHYSICS. 47(1):609-611(2008)
書誌情報 JAPANESE JOURNAL OF APPLIED PHYSICS

巻 47, 号 1, p. 609-611, 発行日 2008-01
資源タイプ(コンテンツの種類)
内容記述タイプ Other
内容記述 Article
ISSN
収録物識別子タイプ ISSN
収録物識別子 0021-4922
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA12295836
DOI
関連識別子
識別子タイプ DOI
関連識別子 https://doi.org/10.1143/JJAP.47.609
関連名称
関連名称 10.1143/JJAP.47.609
出版タイプ
出版タイプ AM
出版タイプResource http://purl.org/coar/version/c_ab4af688f83e57aa
WoS
表示名 Web of Science
URL http://gateway.isiknowledge.com/gateway/Gateway.cgi?&GWVersion=2&SrcAuth=ShinshuUniv&SrcApp=ShinshuUniv&DestLinkType=FullRecord&DestApp=WOS&KeyUT=000255019500050
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