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  1. 060 工学部
  2. 0601 学術論文

Characterization of polycrystalline SiC films grown by HW-CVD using silicon tetrafluoride

http://hdl.handle.net/10091/1007
61c7540a-817e-443b-9990-73c4c991437b
名前 / ファイル ライセンス アクション
K-ABEmanu.pdf K-ABEmanu.pdf (280.4 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2008-02-28
タイトル
言語 en
タイトル Characterization of polycrystalline SiC films grown by HW-CVD using silicon tetrafluoride
言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
著者 Abe, K

× Abe, K

WEKO 38874

Abe, K

Search repository
Nagasaka, Y

× Nagasaka, Y

WEKO 38875

Nagasaka, Y

Search repository
Kida, T

× Kida, T

WEKO 38876

Kida, T

Search repository
Yamakami, T

× Yamakami, T

WEKO 38877

Yamakami, T

Search repository
Hayashibe, R

× Hayashibe, R

WEKO 38878

Hayashibe, R

Search repository
Kamimura, K

× Kamimura, K

WEKO 38879

Kamimura, K

Search repository
信州大学研究者総覧へのリンク
氏名 Kamimura, K
URL http://soar-rd.shinshu-u.ac.jp/profile/ja.yVkaZVkh.html
出版者
出版者 ELSEVIER SCIENCE SA
引用
内容記述タイプ Other
内容記述 THIN SOLID FILMS. 516(5): 637-640 (2008)
書誌情報 Thin solid films

巻 516, 号 5, p. 637-640, 発行日 2008-01-15
資源タイプ(コンテンツの種類)
内容記述タイプ Other
内容記述 Article
ISSN
収録物識別子タイプ ISSN
収録物識別子 0040-6090
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA00863068
DOI
関連識別子
識別子タイプ DOI
関連識別子 https://doi.org/10.1016/j.tsf.2007.06.199
関連名称
関連名称 10.1016/j.tsf.2007.06.199
出版タイプ
出版タイプ AM
出版タイプResource http://purl.org/coar/version/c_ab4af688f83e57aa
WoS
表示名 Web of Science
URL http://gateway.isiknowledge.com/gateway/Gateway.cgi?&GWVersion=2&SrcAuth=ShinshuUniv&SrcApp=ShinshuUniv&DestLinkType=FullRecord&DestApp=WOS&KeyUT=000252285900038
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