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Interface State Density between Direct Nitridation Layer and SiC Estimated from Current Voltage Characteristics of MIS Schottky Diode
http://hdl.handle.net/10091/15982
http://hdl.handle.net/10091/1598274114fe6-d903-4c2b-b541-57bb501436ee
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2012-09-21 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Interface State Density between Direct Nitridation Layer and SiC Estimated from Current Voltage Characteristics of MIS Schottky Diode | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | SiC | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | nitride | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | interface | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | MIS Schottky | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
著者 |
Kamimura, Kiichi
× Kamimura, Kiichi× Shiozawa, Hiroaki× Yamakami, Tomohiko× Hayashibe, Rinpei |
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信州大学研究者総覧へのリンク | ||||||
氏名 | Kamimura, Kiichi | |||||
URL | http://soar-rd.shinshu-u.ac.jp/profile/ja.yVkaZVkh.html | |||||
出版者 | ||||||
出版者 | IEICE-INST ELECTRONICS INFORMATION COMMUNICATIONS ENG | |||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | IEICE TRANSACTIONS ON ELECTRONICS. E92C(12):1470-1474 (2009) | |||||
書誌情報 |
IEICE TRANSACTIONS ON ELECTRONICS 巻 E92C, 号 12, p. 1470-1474, 発行日 2009-12 |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Interface state density was estimated from diode factor n of SiC MIS Schottky diode. The interface state density was the order of 10(12) cm(-2)eV(-1), and was same order to the value for the sample carefully prepared by oxidation and post oxidation annealing. The interface state density determined from n was consistent to the value calculated from the capacitance voltage curve of SiO(2)/nitride/SiC MIS diode by Terman method. High temperature nitridation was effective to reduce the interface state density. | |||||
資源タイプ(コンテンツの種類) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Article | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0916-8524 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA10826283 | |||||
他の資源との関係:URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://search.ieice.org/ | |||||
関連名称 | http://search.ieice.org/ | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1587/transele.E92.C.1470 | |||||
関連名称 | 10.1587/transele.E92.C.1470 | |||||
権利 | ||||||
権利情報 | Copyright© 2009 IEICE | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
WoS | ||||||
表示名 | Web of Science | |||||
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